Semiconductor device package and method of manufacturing the same

ABSTRACT

A semiconductor device package includes an emitting device and a first building-up circuit. The emitting device defines a cavity in the emitting device. The first building-up circuit is disposed on the emitting device.

BACKGROUND 1. Technical Field

The present disclosure relates to a semiconductor device package and amethod of manufacturing the same, and more particularly to asemiconductor device package including an antenna and a method ofmanufacturing the same.

2. Description of the Related Art

Wireless communication devices, such as cell phones, typically includeantennas for transmitting and receiving radio frequency (RF) signals.Comparably, a wireless communication device includes an antenna and acommunication module, each disposed on different parts of a circuitboard. Under the comparable approach, the antenna and the communicationmodule are separately manufactured and electrically connected to eachother after being placed on the circuit board. Accordingly, separatemanufacturing costs may be incurred for both components. Furthermore, itmay be difficult to reduce a size of the wireless communication deviceto attain a suitably compact product design. To reduce the cost andpackage size, an Antenna-in-Package (AiP) approach is provided. Ingeneral, an organic substrate is commonly used in an AiP system.However, due to the process limitation of the organic substrate, it isdifficult to achieve fine-pitch (less than 15/15 μm), and the thicknessof the organic substrate is relatively thick, which will hinder theminiaturization of the AiP system.

SUMMARY

In accordance with some embodiments of the present disclosure, asemiconductor device package includes an emitting device and a firstbuilding-up circuit. The emitting device defines a cavity in theemitting device. The first building-up circuit is disposed on theemitting device.

In accordance with some embodiments of the present disclosure, asemiconductor device package includes an emitting device and anencapsulant. The emitting device defines a cavity in the emittingdevice. The encapsulant covers a lateral surface of the emitting deviceand exposing the second surface of the emitting device.

In accordance with some embodiments of the present disclosure, a methodof manufacturing an optical module includes providing an emittingdevices including a cavity in the emitting device, and building aredistribution layer on the emitting devices.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A illustrates a cross-sectional view of a semiconductor devicepackage in accordance with some embodiments of the present disclosure.

FIG. 1B illustrates a cross-sectional view of a semiconductor devicepackage in accordance with some embodiments of the present disclosure.

FIG. 1C illustrates a top view of a semiconductor device package inaccordance with some embodiments of the present disclosure.

FIG. 2 illustrates a cross-sectional view of a semiconductor devicepackage in accordance with some embodiments of the present disclosure.

FIG. 3A illustrates a cross-sectional view of a semiconductor devicepackage in accordance with some embodiments of the present disclosure.

FIG. 3B illustrates a cross-sectional view of a semiconductor devicepackage in accordance with some embodiments of the present disclosure.

FIG. 4A illustrates a cross-sectional view of a semiconductor devicepackage in accordance with some embodiments of the present disclosure.

FIG. 4B illustrates a cross-sectional view of a semiconductor devicepackage in accordance with some embodiments of the present disclosure.

FIG. 4C illustrates a cross-sectional view of a semiconductor devicepackage in accordance with some embodiments of the present disclosure.

FIG. 4D illustrates a cross-sectional view of a semiconductor devicepackage in accordance with some embodiments of the present disclosure.

FIG. 4E illustrates a cross-sectional view of a semiconductor devicepackage in accordance with some embodiments of the present disclosure.

FIG. 4F illustrates a cross-sectional view of a semiconductor devicepackage in accordance with some embodiments of the present disclosure.

FIG. 5A illustrates a cross-sectional view of a semiconductor devicepackage in accordance with some embodiments of the present disclosure.

FIG. 5B illustrates a cross-sectional view of a semiconductor devicepackage in accordance with some embodiments of the present disclosure.

FIG. 6A, FIG. 6B, FIG. 6C, FIG. 6D, FIG. 6E and FIG. 6F illustrate asemiconductor manufacturing method in accordance with some embodimentsof the present disclosure.

Common reference numerals are used throughout the drawings and thedetailed description to indicate the same or similar components. Thepresent disclosure will be readily understood from the followingdetailed description taken in conjunction with the accompanyingdrawings.

DETAILED DESCRIPTION

FIG. 1A illustrates a cross-sectional view of a semiconductor devicepackage 1A in accordance with some embodiments of the presentdisclosure. The semiconductor device package 1A includes a carrier 10,circuit layers 11, 13, 14, 20, interconnection structures 12 a, 12 b, anelectronic component 15, electrical contacts 16 and package bodies 17,18 and 19.

In some embodiments, the carrier 10 may be or include a glass substrate.In some embodiments, the carrier 10 may be or include an emittingelement having one or more emitting components (e.g., an antenna, alight emitting element, a sensor or the like) disposed thereon. Thecarrier 10 may include conductive pad(s), trace(s), andinterconnection(s) (e.g. via(s)). In some embodiments, the carrier 10may include transparent material. In some embodiments, the carrier 10may include opaque material. Compared to the organic substrate, it iseasier to control the thickness of a glass carrier, which can facilitatethe miniaturization of the semiconductor device package 1A. The carrier10 includes a material having a loss tangent or dissipation factor (Df)less than approximately 0.005. The carrier 10 includes a material havinga loss tangent or Df less than approximately 0.003. In some embodiments,a coefficient of thermal expansion (CTE) of the carrier 10 is in a rangefrom about 0.5 to about 13. In some embodiments, the CTE of the carrier10 is in a range from about 3.6 to about 8.5. In some embodiments, athickness of the carrier 10 is in a range from about 100 μm to about 200μm.

The carrier 10 has a surface 101, a surface 102 opposite to the surface101 and a lateral surface 103 extending between the surface 101 and thesurface 102. A conductive layer 10 p is disposed on the surface 101 ofthe carrier 10. In some embodiments, the conductive layer 10 p defines apatterned antenna, such as a directional antenna, an omnidirectionalantenna, an antenna array. For example, the conductive layer 10 pdefines a patch antenna. The conductive layer 10 p is, or includes, aconductive material such as a metal or metal alloy. Examples of theconductive material include gold (Au), silver (Ag), copper (Cu),platinum (Pt), Palladium (Pd), other metal(s) or alloy(s), or acombination of two or more thereof. In some embodiments, the conductivelayer 10 p may be replaced by one or more light emitting elements orsensors.

The circuit layer 20 (or building-up circuit) has a surface 201 facingaway from the carrier 10, a surface 202 opposite to the surface 201 anda lateral surface 203 extending between the surface 201 and the surface202. The circuit layer 20 is disposed over the carrier 10 and spacedapart from the carrier 10 through support elements 10 m. For example,the circuit layer 20, the support element 10 m and the carrier 10 definea space 10 s. The support elements 10 m may be disposed at or adjacentto the periphery of the carrier 10. In some embodiments, the supportelements 10 m may be formed of or include an attach film, metal or anyother suitable materials. In some embodiments, a thickness of thesupport elements 10 m is in a range from about 100 μm to about 200 Insome embodiments, a width of the circuit layer 20 is substantially thesame as a width of the carrier 10. For example, the lateral surface 203of the circuit layer 20 is substantially coplanar with the lateralsurface 103 of the carrier 10. In other embodiments, the width of thecircuit layer 20 may be greater to or less than the width of the carrier10 depending on different design specifications.

In some embodiments, as shown in FIG. 1C, which illustrates a top viewof the support elements 10 m and the carrier 10, the support elements 10m may fully surround the periphery of the carrier 10. For example, thecarrier 10, the support elements 10 m and the circuit layer 20 maydefine a sealed space 10 s. This can prevent the package body 17 fromentering the space 10 s during the manufacturing process. In otherembodiments, in the case that the package body 17 is omitted, thesupport elements 10 m may not fully surround the periphery of thecarrier 10. For example, there may be a gap between two adjacent supportelements 10 m or the support elements 10 m may include one or moreopenings.

The circuit layer 20 includes one or more conductive layers (e.g.,redistribution layers, RDLs or conductive vias) 20 c, 20 v and one ormore dielectric layers 20 p. A portion of the conductive layers (e.g.,20 v) is covered or encapsulated by the dielectric layer 20 p whileanother portion (e.g., 20 c) of the conductive layer is exposed from thedielectric layer 20 p to provide electrical connections. In someembodiments, a surface of the conductive layer 20 c facing the carrier10 and exposed from the dielectric layer 20 p is within the space 10 s.In some embodiments, the conductive layer 20 c is patterned to becorresponding to the conductive layer 10 p. For example, the conductivelayer 20 c is substantially aligned with the conductive layer 10 p. Theconductive layer 20 c is spaced apart from the conductive layer 10 p.The signal may be transmitted between the conductive layer 20 c and theconductive layer 10 p through coupling. Since there is a space 10 s(e.g., air cavity) between the conductive layer 20 c and the conductivelayer 10 p, the performance of the signal transmission between theconductive layer 20 c and the conductive layer 10 p can be enhanced. Insome embodiments, the circuit layer 20 may act as an interposer. In someembodiments, the carrier 10, conductive layer 10 p, the support elements10 m and the circuit layer 20 may be also referred to as an emittingdevice.

In some embodiments, the dielectric layer 20 p may include polyimide(PI), pre-impregnated composite fibers (e.g., pre-preg),Borophosphosilicate Glass (BPSG), silicon oxide, silicon nitride,silicon oxynitride, Undoped Silicate Glass (USG), any combination of twoor more thereof, or the like. Examples of a pre-preg may include, butare not limited to, a multi-layer structure formed by stacking orlaminating a number of pre-impregnated materials/sheets. In someembodiments, there may be any number of conductive layers 20 c dependingon design specifications. In some embodiments, the conductive layer 20 cis formed of or includes Au, Ag, Cu, Pt, Pd, or an alloy thereof. Insome embodiments, the dielectric layer 20 p and the package body 17 mayinclude the same material. Alternatively, the dielectric layer 20 p andthe package body 17 may include different materials.

The circuit layer 11 (or building-up circuit) is disposed on the circuitlayer 20. The circuit layer 11 has a surface 111 facing away from thecircuit layer 20, a surface 112 opposite to the surface 111 and alateral surface 113 extending between the surface 111 and the surface112. The circuit layer 11 is electrically connected to the circuit layer20. The surface 112 of the circuit layer 11 is in contact with thesurface 201 of the circuit layer 20. In some embodiments, the lateralsurface 113 of the circuit layer 11 and the lateral surface 203 of thecircuit layer 20 (or the lateral surface 103 of the carrier 10) arenoncoplanar or discontinuous. For example, the lateral surface 203 ofthe circuit layer 20 (or the lateral surface 103 of the carrier 10) isrecessed from the lateral surface 113 of the circuit layer 11. Forexample, a width of the circuit layer 20 or the carrier 10 is less thana width of the circuit layer 11.

The circuit layer 11 includes one or more conductive layers (e.g.,redistribution layers, RDLs) 11 c and one or more dielectric layers 11d. A portion of the conductive layer 11 c is covered or encapsulated bythe dielectric layer 11 d while another portion of the conductive layer11 c is exposed from the dielectric layer 11 d to provide electricalconnections. In some embodiments, a surface of the conductive layer 11 cfacing the circuit layer 20 and exposed from the dielectric layer 11 dis in contact with the surface 201 of the circuit layer 20. In someembodiments, the conductive layer 11 c may be or include one or moreantenna patterns, light elements, sensors or the like.

In some embodiments, the dielectric layer 11 d may include PI,pre-impregnated composite fibers (e.g., pre-preg), BPSG, silicon oxide,silicon nitride, silicon oxynitride, USG, any combination of two or morethereof, or the like. Examples of a pre-preg may include, but are notlimited to, a multi-layer structure formed by stacking or laminating anumber of pre-impregnated materials/sheets. In some embodiments, theremay be any number of conductive layers 11 c depending on designspecifications. In some embodiments, the conductive layer 11 c is formedof or includes Au, Ag, Cu, Pt, Pd, or an alloy thereof.

The package body 17 is disposed on the surface 112 of the circuit layer11. The package body 17 covers the carrier 10, the support elements 10 mand the circuit layer 20. The package body 17 covers the lateral surface103 of the carrier 10, a lateral surface of the support elements 10 mand the lateral surface 203 of the circuit layer 20. The surface 102 ofthe carrier 10 is exposed from the package body 17. For example, thesurface 102 of the carrier 10 is substantially coplanar with a surface172 of the package body 17. In some embodiments, the package body 17 hasa lateral surface 173 substantially coplanar with the lateral surface113 of the circuit layer 11. The lateral surface 103 of the carrier 10and the lateral surface 203 of the circuit layer 20 are recessed fromthe lateral surface 173 of the package body 17. For example, there is adistance between the lateral surface 103 of the carrier 10 (or thelateral surface 203 of the circuit layer 20) and the lateral surface 173of the package body 17. In some embodiments, the package body 17includes an epoxy resin including fillers, a molding compound (e.g., anepoxy molding compound or other molding compound), a PI, a phenoliccompound or material, a material including a silicone dispersed therein,or a combination thereof.

One or more interconnection structures 12 a (e.g., conductive pillars orconductive elements) are disposed on the surface 111 of the circuitlayer 11. The interconnection structures 12 a are electrically connectedto the circuit layer 11 (i.e., to the conductive layer 11 c exposed fromthe dielectric layer 11 d). In some embodiments, the interconnectionstructures 12 a define an antenna structure. The interconnectionstructure 12 a is, or includes, a conductive material such as a metal ormetal alloy. Examples of the conductive material include Au, Ag, Cu, Pt,Pd, or an alloy thereof.

The package body 18 is disposed on the surface 111 of the circuit layer11. The package body 18 covers the interconnection structures 12 a. Insome embodiments, the package body 18 has a lateral surface 183substantially coplanar with the lateral surface 113 of the circuit layer11. In some embodiments, the package body 18 includes an epoxy resinincluding fillers, a molding compound (e.g., an epoxy molding compoundor other molding compound), a PI, a phenolic compound or material, amaterial including a silicone dispersed therein, or a combinationthereof.

The circuit layer 13 (or building-up circuit) is disposed on the packagebody 18. The circuit layer 13 has one or more dielectric layers 13 d andone or more conductive layers 13 c. In some embodiments, the dielectriclayer 13 d may include the same material as the dielectric layer 11 d.Alternatively, the dielectric layer 13 d and the dielectric layer 11 dmay include different materials. The conductive layer 13 c iselectrically connected to the interconnection structures 12 a. In someembodiments, there may be any number of conductive layers 13 c dependingon design specifications.

One or more interconnection structures 12 b (e.g., conductive pillars orconductive elements) are disposed on a surface of the circuit layer 13facing away from the circuit layer 11. The interconnection structures 12b are electrically connected to the circuit layer 13. Theinterconnection structure 12 b is, or includes, a conductive materialsuch as a metal or metal alloy. Examples of the conductive materialinclude Au, Ag, Cu, Pt, Pd, or an alloy thereof.

The electronic component 15 is disposed on a surface of the circuitlayer 13 facing away from the circuit layer 11. The electronic component15 may be an active electronic component, such as an integrated circuit(IC) chip or a die. The active surface of the electronic component 15faces the circuit layer 13. The electronic component 15 is electricallyconnected to the circuit layer 13 (e.g., to the conductive layer 13 c)through electrical contacts (e.g., solder balls), and the electricalconnection can be achieved by, for example, flip-chip technique.

The package body 19 is disposed on the surface of the circuit layer 13facing away from the circuit layer 11. The package body 19 covers theinterconnection structures 12 b and the electronic component 15. In someembodiments, the package body 19 has a lateral surface substantiallycoplanar with the lateral surface of the circuit layer 13. In someembodiments, the package body 19 includes an epoxy resin includingfillers, a molding compound (e.g., an epoxy molding compound or othermolding compound), a PI, a phenolic compound or material, a materialincluding a silicone dispersed therein, or a combination thereof.

The circuit layer 14 (or building-up circuit) is disposed on the packagebody 19. The circuit layer 14 has one or more dielectric layers 14 d andone or more conductive layers 14 c. In some embodiments, the dielectriclayer 14 d may include the same material as the dielectric layer 11 d.Alternatively, the dielectric layer 14 d and the dielectric layer 11 dmay include different materials. The conductive layer 14 c iselectrically connected to the interconnection structures 12 b. In someembodiments, there may be any number of conductive layers 14 c dependingon design specifications.

The electrical contacts 16 are disposed on the conductive layer 14 cexposed from the dielectric layer 14 d. In some embodiments, theelectrical contacts 16 may include solder or other suitable material(s).

In some embodiments, the lateral surface 103 of the carrier 10 may becoplanar with the lateral surface 113 of the circuit layer 11. Forexample, the lateral surface 103 of the carrier 10 is exposed from thepackage body 17. Such a structure may be formed by: (i) providing aglass wafer; (ii) forming the circuit layers 11, 13, 14, theinterconnection structures 12 a, 12 b, the package bodies 17, 18, 19 andthe electronic component 15 on the glass wafer; and (iii) performing asingulation through the circuit layers 11, 13, 14, the package bodies17, 18, 19 and the carrier wafer. To meet the requirement of theperformance of the antenna structure, the glass wafer should select amaterial having a relatively low Dk (e.g., less than 5). However, aglass wafer having a relatively low Dk would have a relatively low CTEas well (e.g., less than 13). Due to a CTE mismatch between the glasswafer and the package body 17 (e.g., the package body generally has aCTE greater than 20), warpage issues would occur. As the size of theglass wafer increases, warpage issues become more severe, which mayresult in cracks or damage to the glass wafer.

In accordance with the embodiments as shown in FIG. 1A, the lateralsurface 103 of the carrier 10 is recessed from the lateral surface 111of the circuit layer 11. Such a structure may be formed by (detailedoperations will be described later): (i) performing a singulation for aglass wafer to divide the glass wafer into a plurality glass carriers(e.g., the carrier 10 as shown in FIG. 1A); (ii) attaching the glasscarriers on a release film (the glass carriers being separated from eachother), each glass carrier having a support element thereon and acircuit on the support element to define a cavity; and (iii) forming thecircuit layers 11, 13, 14, the interconnection structures 12 a, 12 b,the package bodies 17, 18, 19 and the electronic component 15 on theglass carriers. Since the size of the divided glass carrier is much lessthan that of the glass wafer, warpage issues can be significantlymitigated. In addition, since the signal is transmitted between theconductive layer 10 p and the conductive layer 20 c through air (e.g.,10 s) rather than the carrier 10, it is unnecessary to select low-Dkmaterials for the carrier 10. This can increase the flexibility inchoosing materials for the carrier 10 to meet other requirements (e.g.,low Df, high hardness or high CTE) to improve the electrical orstructural performance of the semiconductor device package 1A.

FIG. 1B illustrates a cross-sectional view of a semiconductor devicepackage 1B in accordance with some embodiments of the presentdisclosure. The semiconductor device package 1B is similar to thesemiconductor device package 1A as shown in FIG. 1A, and the differencestherebetween are described below.

The lateral surface 113 of the circuit layer 11 is recessed from thelateral surface 173 of the package body 17 or the lateral surface 183 ofthe package body 18. For example, there is a gap between the lateralsurface 113 of the circuit layer 11 and the lateral surface of thelateral surface 183 of the package body 18. For example, the lateralsurface 113 of the circuit layer 11 is covered by the package body 18.For example, a width of the circuit layer 11 is less than a width of thepackage body 18. The package body 18 may directly contact the packagebody 17.

In some embodiments, the lateral surface 113 of the circuit layer 11 maybe substantially coplanar with the lateral surface 203 of the circuitlayer 20 as shown in FIG. 1B. For example, a width of the circuit layer11 is substantially the same as a width of the circuit layer 20. In someembodiments, the lateral surface 113 of the circuit layer 11 isnoncoplanar with the lateral surface 203 of the circuit layer 20 and thelateral surface 183 of the package body 18. For example, a width of thecircuit layer 11 is greater than a width of the circuit layer 20 andless than a width of the package body 18.

FIG. 2 illustrates a cross-sectional view of a semiconductor devicepackage 2 in accordance with some embodiments of the present disclosure.The semiconductor device package 2 is similar to the semiconductordevice package 1A as shown in FIG. 1A, except that in the semiconductordevice package 2, the circuit layer 20 is omitted.

A surface of the conductive layer 11 c facing the carrier 10 and exposedfrom the dielectric layer 11 d is within the space 10 s. In someembodiments, the exposed portion of the conductive layer 11 c ispatterned to be corresponding to the conductive layer 10 p. For example,the conductive layer 11 c is substantially aligned with the conductivelayer 10 p. The conductive layer 11 c is spaced apart from theconductive layer 10 p. The signal may be transmitted between theconductive layer 11 c and the conductive layer 10 p through coupling.

FIG. 3A illustrates a cross-sectional view of a semiconductor devicepackage 3A in accordance with some embodiments of the presentdisclosure. The semiconductor device package 3A is similar to thesemiconductor device package 1A as shown in FIG. 1A, and the differencestherebetween are described below.

The electronic component 15 is disposed on the surface of the circuitlayer 13 facing the circuit layer 14. The electronic component 15 has abackside surface bonded or attached to the surface of the circuit layer13 by an adhesion layer 15 a (e.g., die attach film, DAF). Theelectronic component 15 has an active surface facing the circuit layer14 and electrically connected to the circuit layer 14 through theinterconnection structures 15 c (e.g., conducive pillars).

FIG. 3B illustrates a cross-sectional view of a semiconductor devicepackage 3B in accordance with some embodiments of the presentdisclosure. The semiconductor device package 3B is similar to thesemiconductor device package 1B as shown in FIG. 1B, and the differencestherebetween are described below.

The electronic component 15 is disposed on the surface of the circuitlayer 13 facing the circuit layer 14. The electronic component 15 has abackside surface bonded or attached to the surface of the circuit layer13 by an adhesion layer 15 a (e.g., DAF). The electronic component 15has an active surface facing the circuit layer 14 and electricallyconnected to the circuit layer 14 through the interconnection structures15 c (e.g., conducive pillars).

FIG. 4A illustrates a cross-sectional view of a semiconductor devicepackage 4A in accordance with some embodiments of the presentdisclosure. The semiconductor device package 4A is similar to thesemiconductor device package 1A as shown in FIG. 1A, except that thesemiconductor device package 4A further includes a protection layer 40.The protection layer 40 is disposed on the surface 172 of the packagebody 17 and the surface 102 of the carrier 10. The protection layer 40covers the surface 172 of the package body 17 and the surface 102 of thecarrier 10.

FIG. 4B illustrates a cross-sectional view of a semiconductor devicepackage 4B in accordance with some embodiments of the presentdisclosure. The semiconductor device package 4B is similar to thesemiconductor device package 1B as shown in FIG. 1B, except that thesemiconductor device package 4B further includes a protection layer 40.The protection layer 40 is disposed on the surface 172 of the packagebody 17 and the surface 102 of the carrier 10. The protection layer 40covers the surface 172 of the package body 17 and the surface 102 of thecarrier 10.

FIG. 4C illustrates a cross-sectional view of a semiconductor devicepackage 4C in accordance with some embodiments of the presentdisclosure. The semiconductor device package 4C is similar to thesemiconductor device package 3A as shown in FIG. 3A, except that thesemiconductor device package 4C further includes a protection layer 40.The protection layer 40 is disposed on the surface 172 of the packagebody 17 and the surface 102 of the carrier 10. The protection layer 40covers the surface 172 of the package body 17 and the surface 102 of thecarrier 10.

FIG. 4D illustrates a cross-sectional view of a semiconductor devicepackage 4D in accordance with some embodiments of the presentdisclosure. The semiconductor device package 4D is similar to thesemiconductor device package 4A as shown in FIG. 4A, and the differencestherebetween are described below.

The protection layer 40 is disposed on the surface 102 of the carrier10. The protection layer 40 covers the surface 102 of the carrier 10. Awidth of the protection layer 40 is substantially the same as a width ofthe carrier 10. The protection layer 40 is disposed within the packagebody 17. The package body 17 covers a lateral surface of the protectionlayer 40. A lower surface of the protection layer 40 is substantiallycoplanar with the surface 172 of the package body.

FIG. 4E illustrates a cross-sectional view of a semiconductor devicepackage 4E in accordance with some embodiments of the presentdisclosure. The semiconductor device package 4E is similar to thesemiconductor device package 4B as shown in FIG. 4B, and the differencestherebetween are described below.

The protection layer 40 is disposed on the surface 102 of the carrier10. The protection layer 40 covers the surface 102 of the carrier 10. Awidth of the protection layer 40 is substantially the same as a width ofthe carrier 10. The protection layer 40 is disposed within the packagebody 17. The package body 17 covers a lateral surface of the protectionlayer 40. A lower surface of the protection layer 40 is substantiallycoplanar with the surface 172 of the package body.

FIG. 4F illustrates a cross-sectional view of a semiconductor devicepackage 4F in accordance with some embodiments of the presentdisclosure. The semiconductor device package 4F is similar to thesemiconductor device package 4C as shown in FIG. 4C, and the differencestherebetween are described below.

The protection layer 40 is disposed on the surface 102 of the carrier10. The protection layer 40 covers the surface 102 of the carrier 10. Awidth of the protection layer 40 is substantially the same as a width ofthe carrier 10. The protection layer 40 is disposed within the packagebody 17. The package body 17 covers a lateral surface of the protectionlayer 40. A lower surface of the protection layer 40 is substantiallycoplanar with the surface 172 of the package body.

FIG. 5A illustrates a cross-sectional view of a semiconductor devicepackage 5A in accordance with some embodiments of the presentdisclosure. The semiconductor device package 5A is similar to thesemiconductor device package 1A as shown in FIG. 1A, and the differencestherebetween are described below.

The semiconductor device package 5A may include two parts 5A and 5B. Thepart 5A includes a circuit layer 13 a including one or more dielectriclayers 13 d 1 and one or more conductive layers 13 c 1, the package body19, the electronic component 15, the circuit layer 14, and theinterconnection structures 12 b. The part 5B includes a circuit layer 13b including one or more dielectric layers 13 d 2 and one or moreconductive layers 13 c 2, the package bodies 17, 18, the circuit layers11, 20 and the carrier 10. The part 5A and the part 5B may bemanufactured individually and then connected to each other throughelectrical contacts 51 s (e.g., solder balls). This would increase theyield rate of the semiconductor device package 5A. In some embodiments,an underfill 51 h may be disposed between the part 5A and the part 5B tocover the electrical contacts 51 s. In some embodiments, a width of thepart 5A is the same as a width of the part 5B. Alternatively, the widthof the part 5A may be greater than or less than the width of the part 5Bdepending on design specifications.

FIG. 5B illustrates a cross-sectional view of a semiconductor devicepackage 5B in accordance with some embodiments of the presentdisclosure. The semiconductor device package 5B is similar to thesemiconductor device package 5A as shown in FIG. 5A, and the differencestherebetween are described below.

The electronic component 15 is disposed on the surface of the circuitlayer 14 facing the circuit layer 13 a. The electronic component 15 hasa backside surface bonded or attached to the surface of the circuitlayer 14 by an adhesion layer 15 a (e.g., DAF). The electronic component15 has an active surface facing the circuit layer 13 a and electricallyconnected to the circuit layer 13 a through the interconnectionstructures 15 c (e.g., conducive pillars).

FIG. 6A, FIG. 6B, FIG. 6C, FIG. 6D, FIG. 6E and FIG. 6F illustrate asemiconductor manufacturing method in accordance with some embodimentsof the present disclosure. In some embodiments, the method in FIG. 6A,FIG. 6B, FIG. 6C, FIG. 6D, FIG. 6E and FIG. 6F can be used tomanufacture the semiconductor device package 1A in FIG. 1A.

Referring to FIG. 6A, a carrier 69 is provided. A circuit layer 20including one or more conductive layers 20 c, 20 v and one or moredielectric layers 20 p is formed on the carrier 69. A portion of theconductive layers (e.g., the conductive layer 20 c) is exposed from thedielectric layer 20 p. In some embodiments, the conductive layers 20 c,20 v may be antenna patterns, light elements or sensors. Supportelements 10 m are formed on the circuit layer 20 (e.g., on thedielectric layer 20 p of the circuit layer 20). In some embodiments, thecircuit layer 20 may be formed by fan-out process, bumping process orother suitable lithographic processes. For example, the circuit layer 20may be formed by: (i) forming the dielectric layer 20 p by a coatingoperation; and (ii) forming the conductive layers 20 c, 20 v by anexposure operation, a development operation, a plating operation and thelike. In some embodiments, the conductive layers 20 v may be aconductive material formed in a via of the dielectric layer 20 p. Thevia may be formed by photolithography process.

Referring to FIG. 6B, a plurality of carriers 10 (e.g., glass carriers)is disposed on the support elements 10 m to define spaces 10 s (e.g.,air cavities). In some embodiments, the carriers 10 may be formed byperforming a singulation operation to a wafer-type carrier (a panel-typecarrier or a strip-type carrier) to divide the wafer-type carrier into aplurality carriers 10. Each of the carriers 10 has a conductive layer 10p on a surface of the carrier 10 facing the circuit layer 20. In someembodiments, the conductive layers 10 p may be antenna patterns, lightelements or sensors. The conductive layers 10 p are substantiallyaligned with the conductive layers 20 c. The conductive layers 10 p and20 c are located within the space 10 s. A singulation operation is thencarried out through the support elements 10 m and the circuit layer 20.The singulation may be performed, for example, by using a dicing saw,laser or other appropriate cutting technique. The carrier 69 is thenremoved.

Referring to FIG. 6C, the carriers 10 are disposed on a release film 68.The carriers 10 are separated from each other. For example, there is agap or distance between any two adjacent carriers. A recon process isthen carried out.

Referring to FIG. 6D, a package body 17 is form on the release film 69to cover the carriers 10, the support elements 10 m and the circuitlayers 20. In some embodiments, the package body 17 is formed by, forexample, by a transfer molding technique, a compression technique or anyother suitable techniques. A circuit layer 11 including one or moreconductive layers 11 c and one or more dielectric layers 11 d is formedon the circuit layer 20. The dielectric layer 11 d is formed by, forexample but is not limited to, photolithographic technique.Interconnection structures 12 a are formed on the circuit layer 11 to beelectrically connected to the circuit layer 11. In some embodiments, theinterconnection structures 12 a may be formed by, for example but is notlimited to, plating technique. In some embodiments, the circuit layer 11may be formed by fan-out process, bumping process or other suitablelithographic processes.

A package body 18 is then form on the circuit layer 11 to cover theinterconnection layers 12 a. In some embodiments, the package body 18may be formed to fully cover the interconnection structures 12 a. Aportion of the package body 18 is removed by, for example, grinding orany other suitable techniques to expose a top portion of theinterconnection structures 12 a for electrical connections. In someembodiments, the package body 18 is formed by, for example, by atransfer molding technique, a compression technique or any othersuitable techniques.

Referring to FIG. 6E, a circuit layer 13 including one or moreconductive layers 13 c and one or more dielectric layers 13 d is formedon the package body 18 and electrically connected to the interconnectionstructures 12 a exposed from the package body 18. An electroniccomponent 15 is then disposed on the circuit layer 13 and electricallyconnected to the circuit layer 13. In some embodiments, the electroniccomponent 15 may be connected to the circuit layer 13 through flip-chipor any other suitable processes. In some embodiments, the circuit layer13 may be formed by fan-out process, bumping process or other suitablelithographic processes.

Referring to FIG. 6F, interconnection structures 12 b are formed on thecircuit layer 13 to be electrically connected to the circuit layer 13. Apackage body 19 is formed on the circuit layer 13 to cover theinterconnection structures 12 b and the electronic component 15. In someembodiments, the package body 19 may be formed to fully cover theinterconnection structures 12 b and the electronic component 15. Aportion of the package body 19 is removed by, for example, grinding orany other suitable techniques to expose a top portion of theinterconnection structures 12 b for electrical connections. In someembodiments, the package body 19 is formed by, for example, by atransfer molding technique, a compression technique or any othersuitable techniques.

A circuit layer 14 including one or more conductive layers 14 c and oneor more dielectric layers 14 d is formed on the package body 19 andelectrically connected to the interconnection structures 12 b exposedfrom the package body 19. In some embodiments, the circuit layer 14 maybe formed by fan-out process, bumping process or other suitablelithographic processes.

Electrical contacts 16 are then disposed on the conductive layer 14 cexposed from the dielectric layer 14 d. Singulation may be performed toseparate out individual semiconductor package devices including thesemiconductor package device 1A as shown in FIG. 1A. That is, thesingulation is performed through the circuit layers 11, 13, 14 and thepackage bodies 17, 18 and 19. The singulation may be performed, forexample, by using a dicing saw, laser or other appropriate cuttingtechnique.

As used herein, the terms “substantially,” “substantial,”“approximately,” and “about” are used to denote and account for smallvariations. For example, when used in conjunction with a numericalvalue, the terms can refer to a range of variation of less than or equalto ±10% of that numerical value, such as less than or equal to ±5%, lessthan or equal to ±4%, less than or equal to ±3%, less than or equal to±2%, less than or equal to ±1%, less than or equal to ±0.5%, less thanor equal to ±0.1%, or less than or equal to ±0.05%. As another example,a thickness of a film or a layer being “substantially uniform” can referto a standard deviation of less than or equal to ±10% of an averagethickness of the film or the layer, such as less than or equal to ±5%,less than or equal to ±4%, less than or equal to ±3%, less than or equalto ±2%, less than or equal to ±1%, less than or equal to ±0.5%, lessthan or equal to ±0.1%, or less than or equal to ±0.05%. The term“substantially coplanar” can refer to two surfaces within micrometers oflying along a same plane, such as within 40 within 30 within 20 within10 or within 1 μm of lying along the same plane. Two surfaces orcomponents can be deemed to be “substantially perpendicular” if an angletherebetween is, for example, 90°±10°, such as ±5°, ±4°, ±3°, ±2°, ±1°,±0.5°, ±0.1°, or ±0.05°. When used in conjunction with an event orcircumstance, the terms “substantially,” “substantial,” “approximately,”and “about” can refer to instances in which the event or circumstanceoccurs precisely, as well as instances in which the event orcircumstance occurs to a close approximation.

As used herein, the singular terms “a,” “an,” and “the” may includeplural referents unless the context clearly dictates otherwise. In thedescription of some embodiments, a component provided “on” or “over”another component can encompass cases where the former component isdirectly on (e.g., in physical contact with) the latter component, aswell as cases where one or more intervening components are locatedbetween the former component and the latter component.

As used herein, the terms “conductive,” “electrically conductive” and“electrical conductivity” refer to an ability to transport an electriccurrent. Electrically conductive materials typically indicate thosematerials that exhibit little or no opposition to the flow of anelectric current. One measure of electrical conductivity is Siemens permeter (S/m). Typically, an electrically conductive material is onehaving a conductivity greater than approximately 10⁴ S/m, such as atleast 10⁵ S/m or at least 10⁶ S/m. The electrical conductivity of amaterial can sometimes vary with temperature. Unless otherwisespecified, the electrical conductivity of a material is measured at roomtemperature.

Additionally, amounts, ratios, and other numerical values are sometimespresented herein in a range format. It can be understood that such rangeformats are used for convenience and brevity, and should be understoodflexibly to include not only numerical values explicitly specified aslimits of a range, but also all individual numerical values orsub-ranges encompassed within that range as if each numerical value andsub-range is explicitly specified.

While the present disclosure has been described and illustrated withreference to specific embodiments thereof, these descriptions andillustrations do not limit the present disclosure. It can be clearlyunderstood by those skilled in the art that various changes may be made,and equivalent elements may be substituted within the embodimentswithout departing from the true spirit and scope of the presentdisclosure as defined by the appended claims. The illustrations may notnecessarily be drawn to scale. There may be distinctions between theartistic renditions in the present disclosure and the actual apparatus,due to variables in manufacturing processes and such. There may be otherembodiments of the present disclosure which are not specificallyillustrated. The specification and drawings are to be regarded asillustrative rather than restrictive. Modifications may be made to adapta particular situation, material, composition of matter, method, orprocess to the objective, spirit and scope of the present disclosure.All such modifications are intended to be within the scope of the claimsappended hereto. While the methods disclosed herein have been describedwith reference to particular operations performed in a particular order,it can be understood that these operations may be combined, sub-divided,or re-ordered to form an equivalent method without departing from theteachings of the present disclosure. Therefore, unless specificallyindicated herein, the order and grouping of the operations are notlimitations of the present disclosure.

What is claimed is:
 1. A semiconductor device package, comprising: anemitting device defining a cavity in the emitting device, the emittingdevice comprising: a first emitting layer; a support element disposed onthe first emitting layer; and a second emitting layer disposed on thesupport element; and a first building-up circuit disposed on theemitting device, wherein a width of the emitting device is less than awidth of the first building-up circuit.
 2. The semiconductor devicepackage of claim 1, wherein a lateral surface of the emitting device isrecessed from a lateral surface of the first building-up circuit.
 3. Thesemiconductor device package of claim 1, wherein a lateral surface ofthe emitting device is substantially coplanar with a lateral surface ofthe first building-up circuit.
 4. The semiconductor device package ofclaim 1, further comprising a first package body covering a lateralsurface of the emitting device and exposing surface of the emittingdevice adjacent to the lateral surface of the emitting device.
 5. Thesemiconductor device package of claim 1, wherein the first emittinglayer including a first emitting pattern; the second emitting layerincluding a dielectric layer, a via penetrating the dielectric layer anda second emitting pattern connected to the via; and the second emittingpattern faces the first emitting pattern and substantially aligned withthe first emitting pattern.
 6. The semiconductor device package of claim5, further comprising a first package body covering a lateral surface ofthe support element, a lateral surface of the first emitting layer and alateral surface of the second emitting layer.
 7. The semiconductordevice package of claim 6, wherein the first package body and thedielectric layer of the second emitting layer include the same material.8. The semiconductor device package of claim 5, wherein the supportelement directly contacts the dielectric layer of the second emittinglayer.
 9. The semiconductor device package of claim 1, wherein thesupport element fully surrounds the cavity.
 10. The semiconductor devicepackage of claim 1, further comprising: a first set of conductivepillars disposed on the first building-up circuit; and a second packagebody disposed on the first building-up circuit and covering the firstset of conductive pillars.
 11. The semiconductor device package of claim10, further comprising: a third building-up circuit disposed on thesecond package body; a second set of conductive pillars disposed on thethird building-up circuit; and a third package body disposed on thethird building-up circuit and covering the second set of conductivepillars.
 12. The semiconductor device package of claim 11, furthercomprising an electronic component disposed on the third building-upcircuit and covered by the third package body, the electronic componenthaving an active surface facing the third building-up circuit andelectrically connected to the third building-up circuit.
 13. Asemiconductor device package, comprising: an antenna device defining acavity in the antenna device, the antenna device comprising: a firstemitting layer; a support element disposed on the first emitting layer;and a second emitting layer disposed on the support element; and anencapsulant covering a lateral surface of the antenna device andexposing a surface of the antenna device adjacent to the lateral surfaceof the antenna device.
 14. The semiconductor device package of claim 13,wherein the first emitting layer including a first emitting pattern; thesecond emitting layer including a dielectric layer, a via penetratingthe dielectric layer and a second emitting pattern connected to the via;and the second emitting pattern faces the first emitting pattern andsubstantially aligned with the first emitting pattern.
 15. Thesemiconductor device package of claim 13, wherein the support elementfully surrounds the cavity.